suitability of mems accelerometers for condition monitoring an experimental study适用性mems加速度计的状态监测实验研究.pdf

Sensors 2008, 8, 784-799 sensors ISSN 1424-8220 © 2008 by MDPI /sensors Full Research Paper Suitability of MEMS Accelerometers for Condition Monitoring: An experimental study Alhussein Albarbar *, Samir Mekid*, Andrew Starr and Robert Pietruszkiewicz School of Mechanical, Aerospace and Civil Engineering, University of Manchester, Manchester, M60 1QD, U.K. * Authors to whom correspondence should be addressed. E-mail: a.albarbar@mmu.ac.uk, s.mekid@manchester.ac.uk Received: 30 November 2007 / Accepted: 1 February 2008 / Published: 6 February 2008 Abstract: With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen. Micro-Electro Mechanical Systems (MEMS) accelerometer is one of the available options. The performances of three of the MEMS accelerometers from different manufacturers are investigated in this paper and compared to a well calibrated commercial accelerometer used as a reference for MEMS sensors performance evaluation. Tests were performed on a real CNC machine in a typical industrial environmental workshop and the achieved results are presented. Keywords: Condition Monitoring, Micro-Electro Mechanical System, MEMS Accelerometer, Vibration Measurements, Transfer Function. 1. Introduction Any major item of industrial machinery requires a cert