薄膜体声波谐振器的研究进展.pdf

3·30 · 材料导报 　　 　　2006 年 11 月第 20 卷专辑 Ⅶ 薄膜体声波谐振器的研究进展 谢和平 ,张树人 ,杨成韬 ,张洪伟 ,叶井红 ( 电子科技大学电子薄膜与集成器件国家重点实验室 ,成都 6 10054) ( ) 　　摘要 　　薄膜体声波滤波器作为一种发展高频滤波器的全新解决方案 , 比声表面波滤波器 SA WF 、陶瓷介质滤 波器具有更高的 Q 值 ,低的损耗和在高频时具备更高的功率承受能力 。介绍了薄膜体声波谐振器的研究历史和研究 概况 ,薄膜体声波谐振器的原理和 3 种典型结构 ,具体阐述了薄膜体声波谐振器的关键技术及其材料体系的要求 。 关键词　　微电子机械系统 　薄膜体声波谐振器 　SMR 结构 　悬空结构 Research Progress in Fil m Bul k Acoustic Resonator XIE Heping ,Z HAN G Shuren , YAN G Chengt ao ,Z HAN G Hongwei , YE J inghong (State Key Lab of Electronic Thin Films and Integrated Devices , University of Electronic Science and Technology of China , Chengdu 610054) Abstract 　　A s a new met ho d for develop ment of high f requency filt er ,t he bulkacou stic wave filt er compo sed of piezoelect ric t hin film resonator s ha s many feat ures sup erior to t ho se of ot her small filt er s such as a surface acou stic wave ( SA W) filt er and a ceramic filt er ,such as a high Q factor t hat leads to lowlo ss and a high power durabilit y p artic ularly in t he highf requency . In t hi s p ap er , t he feat ure and hi story of t he piezoelect ric t hin film resonator filt er sare are described , and the develop ment s of piezoelectric t hin film resonator filter s in t he world are reviewed. The principle and typical st ructure of the FBAR are analyzed , and the key technology and requirement s of the materials are rep resented in detail . Key words 　　M EM S ,film bulk acou stic resonator ,solidly mount ed resonator ,cavit y st ruct ure 　 　　在现代无线通讯技术的推进中 ,高频微波元件的相关发展