子孔径拼接干涉测量一大口径双曲面_英文_.pdf

第 卷第 期 年 月 38 1 红外与激光工程 2009 2 Vol.38 No.1 Infrared and Laser Engineering Feb. 2009 Subaperture stitching interferometry for testing a large hyperboloid 1 1 1,2 1,2 1 WANG Xiao 蛳kun , ZHENG Li 蛳gong , ZHANG Bin 蛳zhi , YAN Feng , ZHANG Zhong 蛳yu , ZHANG Xue 蛳jun 1 (1.Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2.Graduate School of the Chinese Academy of Sciences, Beijing 100039, China) Abstract: In order to test large aspheric surfaces without the aid of null optics, a novel method called subaperture stitching interferometry (SSI) is presented. The synthetical optimization stitching model are 蛳 established based on homogeneous coordinate ′s transform and simultaneous least squares fitting. A prototype of testing large aspheres is developed by the stitching method. The experiment of testing a hyperboloid with SSI is carried out. The PV and RMS of the surface are 0.319λ and 0.044λ ( is 632.8 nm) respectively when five subapertures are stitched together. For comparison and validation, th