ZnO-SnO2透明导电薄膜光电特性研究【毕业论文】.doc

- PAGE I - 本科毕业设计 （20 届） ZnO-SnO2透明导电薄膜光电特性研究 所在学院 专业班级 电气工程及其自动化 学生姓名 学号 指导教师 职称 完成日期 年 月 PAGE I 摘　要 【摘要】本课题主要研究了ZnO-SnO2复合纳米材料的光电特性，通过水热法制作了ZnO-SnO2复合纳米材料，通过X射线衍射（XRD）、场发射扫描电子显微镜（SEM）、紫外透过率对样品的形貌、晶体结构和直接光学带隙等进行了细致的表征，最终确定优化了的反应条件。同时以纳米ZnO-SnO2复合材料为气敏材料通过丝网印刷的方法制作了厚膜传感器，对样品进行了电阻率和对NO的气敏性能测试，结果表明在350℃工作条件下对NO的气敏响应明显，通入还原性气体NO，会和氧气反应产生NO2，从而释放出吸附氧的电子使材料电阻变小，电流增大。 【关键词】ZnO-SnO2； 透明导电氧化物；光电特性；气敏性。 Abstract 【ABSTRACT】In this?paper, we mainly discuss the optical?and electrical properties of?ZnO-SnO2, ZnO-SnO2? compound nano-composites were successfully prepared by hydrothermal reaction., The morphology, crystallization and band gap were characterized using X-ray diffraction, transmission electron?microscopy and ultraviolet spectrophotometer. The optimized reaction conditions were achieved. On the other hand, thick film sensors were prepared by the the method? of screen printing? and the?gas sensing response?of? NO was tested. The results indicate that the gas sensing response of NO at the temperature of 350 ℃ was obvious. The introduced gas of NO reacts with the absorbed. oxygen in ZnO-SnO2, accompanying the release of electrons and leading to the decrease of resistance and the increase of current. 【KEYWORDS】ZnO-SnO2; Transparent?conductive oxide；Optical?properties；Gas sensitivity。 目　录 TOC \o 1-3 \h \z \u HYPERLINK \l _Toc293661817 目　录 PAGEREF _Toc293661817 \h IV HYPERLINK \l _Toc293661818 1 引言 PAGEREF _Toc293661818 \h 1 HYPERLINK \l _Toc293661819 1.1 透明导电膜概述 PAGEREF _Toc293661819 \h 1 HYPERLINK \l _Toc293661820 1.1.1 SnO2基薄膜概述 PAGEREF _Toc293661820 \h 1 HYPERLINK \l _Toc293661821 1.1.2 ZnO基薄膜概述 PAGEREF _Toc293661821 \h 2 HYPERLINK \l _Toc293661822 1.1.3 ZnO -SnO2基薄膜概述 PAGEREF _Toc293661822 \h 3 HYPERLINK \l _Toc293661823 1.2 ZnO-SnO2复合材料的制作方法及实验仪器介绍 PAGEREF _Toc293661823 \h 4 HYPERLINK \l _Toc293661824 1.2.1 纳米ZnO-SnO2材料的制备方法 PAGEREF _Toc