氧化锌纳米棒在透明导电薄膜用AZO织构陶瓷中的应用研究【毕业论文】.doc

- PAGE I - 本科毕业设计 （20 届） 氧化锌纳米棒在透明导电薄膜用AZO织构陶瓷中的应用研究 所在学院 专业班级 电子信息科学与技术 学生姓名 学号 指导教师 职称 完成日期 年 月 PAGE I 摘　要 【摘要】本研究首先采用低温水热反应方式可控合成一维氧化锌纳米棒，纳米棒，然后将其作为模板晶粒分散到高浓度的ZnO浆料体系中，经过电场诱导以及高温烧结，获得具有一定程度002取向的ZnO基陶瓷材料，该陶瓷材料有望作为磁控溅射靶材，用来实现高性能AZO透明导电薄膜高速均匀沉积。研究显示：（1）一维氧化锌纳米棒的可控合成的主要影响因素有反应物浓度，反应温度以及反应时间；（2）以一维氧化锌纳米棒为模板，采用电场诱导辅助注浆成型的方式，初步获得具有一定002取向的ZnO基陶瓷。 【关键词】ZnO纳米棒；织构；ZnO基陶瓷。 Abstract 【ABSTRACT】In this paper, ZnO nanorods as one-dimensional templated grains were first controllably synthesized by a low-temperature hydrothermal process, then well dispersed into a high concentration ZnO slurry system by a high energy mechanical milling. When inducing a high electric field on the slurry, ZnO nanorods were orientated alone the electric field direction. After removing the water from slurry during the slip casting, the oriented nanorods would be solidified in the green body. Sintered at a high temperature over 1300℃, a ZnO-based ceramic with a certain degree of orientation alone 002 direction could be prepared. This textured ceramic will be expected to used as magnetron sputtering targets for high speed, uniform depositing AZO transparent conductive film. The following results can be gotten: (1) the main influence factors on ZnO nanorods controllable synthesis were found to be the concentration of reactants, temperature and reaction time; (2) XRD pattern shows that the ZnO-based ceramic has a certain degree of orientation alone ZnO 002 direction. 【KEYWORDS】ZnO nanorods; Texture; ZnO ceramic.  目　录 TOC \o 1-3 \h \z \u HYPERLINK \l _Toc293693365 摘　要 PAGEREF _Toc293693365 \h II HYPERLINK \l _Toc293693366 Abstract PAGEREF _Toc293693366 \h III HYPERLINK \l _Toc293693367 目　录 PAGEREF _Toc293693367 \h IV HYPERLINK \l _Toc293693368 1 前言 PAGEREF _Toc293693368 \h 1 HYPERLINK \l _Toc293693369 1.1 磁控溅射过程简介 PAGEREF _Toc293693369 \h 1 HYPERLINK \l _Toc293693370 1.2 靶材在磁控溅射