基于微流体系统的捕获单元芯片的设计与实验验证-微电子学与固体电子学专业论文.docx

基于微流体系统的捕获单元芯片的设计与实验验证 基于微流体系统的捕获单元芯片的设计与实验验证 DESIGN AND TEST VERIFICATION OF A MICROFLUIDIC CHIP WITH CAPTURING CELLS BASED ON MICROFLUIDIC SYSTEM ABSTRACT Suspension array immunochip is a new technology which is widely used in biomedical engineering in the field of life science research in recent years. Suspension array chip, combining with microfluidic technology, recently has proven to be high effect, high speed, high sensitivity, high speciality, low cost, can realize the multiplexed bioassay, ultra-high-throughput bioassay, no requirement for a sophisticated high precision spotting device in the speed bioassay. It has become one of the most attractive fields in μ-TAS, which serving as a platform for drug selection and clinical diagnostic bioassay schemes based on the high-throughput suspension array technology. The dissertation focuses on a novel bio-microsystem of a suspension array chip. The microsysytem is applied to the separation and detection of biological samples. The main contents of this dissertation are as following: The arts and crafts of nano-imprint lithography have been built completely. This paper presents fabrication of the high-resolution micro-scale patterns using Hot Embossing Lithography (HEL) .This process creates features by transferring the micro-structures in a stamper onto PMMA thermoplastic materials under certain temperature and pressure. Some problems influencing the micro-scale pattern precision are solved and the process parameters are optimized through analyzing some related parameters of influencing the pattern precision and simulating filling mechanisum of polymer with MEMS-specific design software IntelliSuite. Finally, the high-resolution patterns are gained with optimum parameter by ii 河北工业大学硕士学位论文 河北工业大学硕士学位论文 nano-imprint Obduct machine. A program of double-side multi-layer metal microparticles for bioassays is brought up and the microparticles are manufactured by HEL.The microparticles, which are metallic micros