wwwspmcomcn等离子体处理提高金属镀层与有机基底附着力的.pdf

第 28 卷 　第 4 期 真 　空 　科 　学 　与 　技 　术 　学 　报 　　　　　　　 　　　　　　　　　　　 2008 年 7 、8 月 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 379 　 等离子体处理提高金属镀层与有机基底附着力的研究 霍纯青 　桑利军 　陈　强 　岳 　蕾 　付亚波 (北京印刷学院印刷包装材料与技术北京市重点实验室 ,等离子体物理及材料研究室 　北京 　102600) Interfacial Adhesion of Al Coatings and Plasma Modified Polymethylmethacrylate Substrates Huo Chunqing ,Sang Lijun ,Chen Qiang ,Yue Lei ,Fu Yabo (Lab of Plasma Physics and Materials , Printing Packaging Material and Technology ) Beijing Key laboratory , Beijing Institute of Graphic Communication , Beijing 102600, China n 　　Abstract 　The aluminum coatings were deposited by reactive magnetron sputtering on polymethylmethacrylate (PM c MA) substrates , surface modified with plasma cleaning and on the transition layer coated PMMA substrates. The mi . crostructures and properties of the Al coating were characterized with atomic force microscopy (AFM) and conventional mechanical probes. The results show that the surface modification with oxygen or argon plasma significantly improves the m corrosion resistance and the adhesion at the interface of the Al films and PMMA substrates. Besides ,the transition layers o of either epoxy or SiO2 may also considerably strengthens the interfacial ad