Ra和Rq分别为高度差的平均值及标准差.doc

200nm*200nm Before radiation Ra:0.103 Rq:0.134 200nm*200nm After H+ radiation Ra:0.124 Rq:0.161 200nm*200nm After Si3+ radiation Ra:0.135 Rq:0.173 Mao4 25um * 25um Ra:1.838 25um * 25um Ra:0.495 Before radiation Rq:5.172 After Si3+ radiation Rq:0.874 5um * 5um Ra:0.833 5um * 5um Ra:0.232 Before radiation Rq:1.877 After Si3+ radiation Rq:0.393 1um * 1um Ra:0.348 1um * 1um Ra:0.128 Before radiation Rq:0.430 After Si3+ radiation Rq:0.164 500nm * 500nm Ra:0.309 500nm * 500nm Ra:0.132 Before radiation Rq:0.398 After Si3+ radiation Rq:0.168 200nm * 200nm Ra:0.130 500nm * 500nm Ra:0.130 Before radiation Rq:0.700 After Si3+ radiation Rq:0.168 Ra和Rq分別為高度差的平均值及標準差，計算公式如下： 由以下的數字我們可以做個比較： Mao1 Mao2 Mao3 Mao4 Ra Rq Ra Rq Ra Rq Ra Rq 25um * 25um 2.293 5.166 3.860 6.405 1.477 3.433 1.838 5.172 H+ 2.293 5.793 3.077 5.440 0.767 1.828 Si3+ 15.925 19.362 4.824 6.913 3.389 9.274 0.495 0.874 5um * 5um 3.955 6.173 2.023 2.920 0.147 0.238 0.833 1.877 H+ 2.239 3.440 4.528 10.204 0.201 0.370 Si3+ 4.987 6.795 5.732 7.742 0.217 0.291 0.232 0.393 1um * 1um 3.077 4.509 3.125 3.633 0.148 0.204 0.348 0.430 H+ 0.745 0.981 1.908 2.358 0.173 0.312 Si3+ 3.169 4.468 2.930 3.043 0.172 0.220 0.128 0.164 500nm * 500nm 1.682 2.342 0.425 0.516 0.172 0.231 0.309 0.398 H+ 0.395 0.518 0.579 0.875 0.166 0.219 Si3+ 0.322 0.415 1.349 1.953 0.161 0.206 0.132 0.168 200nm * 200nm 0.283 0.350 0.460 0.696 0.103 0.134 0.130 0.700 H+ 0.277 0.377 0.105 0.136 0.124 0.161 Si3+ 0.371 0.514 0.285 0.362 0.135 0.173 0.130 0.168