静电放电(esd)保护器件的模拟与仿真 大学论文.doc

编号 论文 题目：学院专业 年月 摘 要 ，、ABSTRACT ESD is one of the most important reliability problems of IC products which lies in every flow of IC production, and it is also one of the most difficult problems of developing new generation technology, therefore, the research on ESD protection design has attracted more and more attention. The applications of simulation tools on ESD area make the design of ESD protection devices more convenient, and greatly shorten the development cycle. However, due to the complicated physical mechanism of ESD, the extremely high field and high temperature when ESD happened, and the frequently convergence problem in ESD simulation, it becomes difficult to carry out the ESD simulation. So this paper particularly explain show ESD comes from, what harm will bring, how to test the integrated circuits ability to prevent from the static, also concentrates on the simulation of ESD protection devices, based on the Sentaurus TCAD platform. And the main content of this paper include: First, this paper points out the basic theory, test methods and protective mechanism of ESD protection. Second, study the importance of the grid to define the steps and process simulation processes in the process simulation, and the method of the grid defined discussed. Third, in device simulation process and device simulation is studied in physical model and the model function, and to describe the same physical mechanism of the various models of comparative analysis. Mainly includes the transmission equation model, the energy band model, all kinds of mobility degradation model, avalanche ionization model and composite model. Forth, Study BJT and SCR protection device simulation, and the simulation results through analysis, research the working mechanism of the ESD protection device under ESD stress effects. Keyword: ESD; Grid; Device simulation; BJT; SCR 目 录 第1章 绪论 1 1.1 课题的研究背景及意义 1 1.2 国内外概况 1 1.3 本课题的研究内容 2 第2章 ESD的常用保护器件及测试方法 3 2.1 ESD简介 3 2.2 ESD防护器件 5 2.2