基于规则的批处理设备调度方法在半导体晶圆制造 ... - researchgate.pdf

See discussions, stats, and author profiles for this publication at: /publication/282697001 Rule-based scheduling of batch processing machine applied to semiconductor wafer fabrication system Article in Shanghai iaotong Daxue Xuebao/ ournal of Shanghai iaotong University · February 2013 CITATION READS 1 22 7 authors, including: Zhibin iang You Li Shanghai iao Tong University Shanghai iao Tong University 182 PUBLICATIONS 1,31 CITATIONS 12 PUBLICATIONS 17 CITATIONS SEE PROFILE SEE PROFILE Na Geng Shanghai iao Tong University 49 PUBLICATIONS 247 CITATIONS SEE PROFILE Some of the authors of this publication are also working on these related projects: Operations management decision for servitization supply chain View project All content following this page was uploaded by You Li on 07 anuary 2016. The user has requested enhancement of the downloaded file. 第 卷第 期 上 海 交 通 大 学 学 报 ４７ ２ Ｖｏｌ．４７Ｎｏ．２ 　 　 年 月 ２０１３ ２ Ｆｅｂ．２０１３ 　 ＪＯＵＲＮＡＬＯＦＳＨＡＮＧＨＡＩＪＩＡＯＴＯＮＧ ＵＮＩＶＥＲＳＩＴＹ 　 　 　 　 　 　 文章编号： （ ） １００６２４６７２０１３０２０２３００６ 　　 － － － 基于规则的批处理设备调度方法在 半导体晶圆制造系统中应用 李 程 ， 江志斌 ， 李 友 ， 李 娜 ， 耿 娜 ， 姚世清 ， 贾文友