PHOTON 第二届光伏设备会议讲稿集 14 16.pdf
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2nd PV Production Equipment Conference
January 16, 2008 Shenzen
Thin-Film Technology
Laser scribing Equipment
Agenda
ï Introduction Manz Automation AG
ï Scribing Process ñ Basics
ï Scribing processes
- Exemplary results
- Process parameters
- Systems
ï Laser edge removal
ï Conclusions
Incoming wafer S
Glass input inspection c
o
Automation Robot with p
inline QA buffer e
Coatimg TCO o
f
Texturizing
Automation Robot with S
buffer u
Laser scribing p
p
P1
Diffusion
l
Automation Robot with buffer y
Coating inline QA S M
T i a
absorber l
h i
c
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