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PHOTON 第二届光伏设备会议讲稿集 14 16.pdf

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2nd PV Production Equipment Conference January 16, 2008 Shenzen Thin-Film Technology Laser scribing Equipment Agenda ï Introduction Manz Automation AG ï Scribing Process ñ Basics ï Scribing processes - Exemplary results - Process parameters - Systems ï Laser edge removal ï Conclusions Incoming wafer S Glass input inspection c o Automation Robot with p inline QA buffer e Coatimg TCO o f Texturizing Automation Robot with S buffer u Laser scribing p p P1 Diffusion l Automation Robot with buffer y Coating inline QA S M T i a absorber l h i c
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