THE RESIDUAL STRESS MEASUREMENT OF TiCN （TiCN的残余应力测量）.pdf

Copyright (c)JCPDS-International Centre for Diffraction Data 2002, Advances in X-ray Analysis, Volume 45. 365 THE RESIDUAL STRESS MEASUREMENT OF TiCN PVD FILMS 1 2 3 Shigeki Takago, Masahide Gotoh, Toshihiko Sasaki and 3 Yukio Hirose 1Industrial Research Institute of Ishikawa Ro-1,Tomizu-machi, Kanazawa, Ishikawa 920-0223, Japan 2 Graduate school, Kanazawa University 3Department of Materials Science and Engineering, Kanazawa University Kakuma-machi, Kanazawa, Ishikawa 920-1192, Japan ABSTRACT The development of titanium carbon nitride (TiCN) coating is aimed at improving wear resistance of metal cutting tools and punches. To measure the mechanical property of the TiCN coating material treated at a high temperature, it is important to improve the quality of the product used under this condition. The X-ray diffraction technique enables us to measure the internal stress through X-ray penetration depth, and is an effective method for the texture analysis of the thin-film material. In this study, TiCN thin films were deposited by the physical vapor deposition method (PVD). Subsequently, the samples were treated under various temperatures. Influences of heat treatment temperature on residual stress and texture characterization were considered [1][2]. The follo