C_C多层类金刚石薄膜的热稳定性研究.pdf

第28卷 第 6 期 真 空 科 学 与 技 术 学 报 2008 年 11、12 月 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 557 C/ C 多层类金刚石薄膜的热稳定性研究 1, 2 1* 1 ( 11 西南交通大学材料先进技术教育部重 实验室, 四川省人工器官表面工程重 实验室 成都 610031; 21 重庆工学院材料科学与工程学院 重庆 400050) Thermal St ability of C/ C Mult i2Layer s 1, 2 1* 1 Gou Yinning ,Huang Nan , Sun Hong (11 SichuanKey laboratory of Surface Engineering of Artificial Organs,KeyLaboratory of Advanced Technologies of Materials, Ministry of Education,Southwest Jiaotong University, hengdu 610031, hina; 21School of Science and Engineering, hongqing Institute of Technology, hongqing 400050, hina) Abstract The diamond2li e carbon (DLC) multilayers were grown by filtered cathodic vacuum arc deposition on substrates of silicon and 0Cr19Ni9 alloy, and annealed at 300 e and 400 e in air. The microstructures and mechanical properties of the DLC multilayers were characterized with X2ray diffraction ( XRD) , X2ray photoelectron spectroscopy (XPS) , scanning electron microscopy ( SEM) and conventional mechanical probes. The results show that the annealing temperature significantly affects its microstructures and mechanical properties.For example, annealing at 400 e optimizes its thermal stability. Possible mechanisms were also tentatively explained. Keywor ds Fi