晶界相和晶界对AlN陶瓷热导率的影响.pdf

第20 卷 第2期 总第78期 Vol 1 20 No 1 2 Materials Science Engineering June2 0 0 2 :1004-793X(2002)02-0238-04 AlN 1 1 1 2 2 , , , , (11 , 100101; 21 , 100016) = CaO-Y O AlN ; 2 3 AlN ; AlN = AlN; ; ; :TQ17 11 :A Influence of Grain Ed e Phase and Grain Ed e on the Thermal Conductivity of AlN Ceramics 1 1 1 2 2 HUANG Xiao-li , MA Qin-zhi , ZHENG Yon-hon , LI Fa , LIU Hui-qin (1. Beijin Information Technolo y Institue, Beijin 100101; 2. Beijin Vacuum Electronics Research Institute, Beijin 100016, China) = Abstract AlN ceramics doped with CaO-Y O were sintered by the hot-pressure and norma-l pressure methods. The grain edge 2 3 phase and it. s production and the mechanism removing oxygenwere studied in this paper, and the grain edge compositions of two kinds of AlN ceramics were analyzed.The thermal conductivity of AlN ceramics corresponding to different grain edge phase and grain edge composi- tion were measured. = Key words aluminum-nitride; thermal conductivity; grain edge phase; grain edge AlN 1 引 言 2 实验材料及方法 , , 211 AlN AlN , , 1Lm, 5~ 10wt% Y O 015~ 2wt%