Effect of Lattice Mismatch on Luminescence of ZnOSi HeteroStructure.pdf

第 27 卷 　第 2 期 半 　导 　体 　学 　报 V ol . 27 　N o . 2 2006 年 2 月 C H IN ES E J O U RN AL O F S EM I CON D U C TO RS Feb . ,2006 Effect of Lattice Mismatch on Luminescence of ZnO/ Si HeteroStructure Fu Z h u xi , Su n Xi a n k ai , Z h u J u nj ie , a n d L i n B ixi a ( Dep art ment of Physics , U niversit y of Science a n d Tech n ol ogy of Chi n a , Hefei 　230026 , Chi n a) Abstract : Th e p h ot olu minesce nce ( PL ) a n d R a m a n sp ect r a of u n dop e d Z n O f ilms dep osit e d dir ect ly on Si sub st r at e (sa mp le A ) , on Si subst r at e t h r ough a Si C buf f er layer (sa mp le B) , a n d on a Zn O cr yst al w af er (sa mp le C) ar e invest igat e d . Th er e ar e e missi on p e a ks ce nt er e d at 3 . 18e V (ult r avi olet , U V ) an d 2 . 38e V ( gr ee n) in t h ese sa m p les . C omp arin g t h e R a m a n sp ect r a an d t h e variat i on of t h e PL p ea k int e nsit ies wit h an ne alin g at m osp h er e , w e c onclu de t h at t h e lu minesce nce of t h e sa mp les is r elat e d t o t h e t e nsile st r ain in t h e Zn O f ilm due t o t h e lat t ice mis m at c h bet w een t h e f ilm a n d t h e subst r at e . I n p ar t icul ar ,t h e t e nsile st r ain r e duces t h e f or m at i on en er gy of O Zn an t isit e oxyge n def ects ,w hic h ge ner at e t h e gr ee n e m