一种新型RF-MEMS微天线的设计与实现-易迪拓培训.PDF

工艺 ·技术 ·应用 一种新型RF-MEMS 微天线的设计与实现 叶 启，曲炳郡，耿玉洁 （清华大学微电子学研究所，北京 100084 ） 摘 要：针对 13.56MHz RFID 系统大面积平面螺旋线圈天线存在的缺陷，提出了一种用于 13.56MHz 频段 的新型 RF-MEMS 微天线，并使用 HFSS 软件进行了仿真和设计，同时采用 MEMS 工艺实现器件制作。该微天 线由螺线管线圈及高性能铁氧体薄膜组成，总体尺寸小于 10mm×6.7mm×0.46mm。该微天线灵敏度达到了 36.2mV/μT ，使用电感值为 1.6μH 的读卡器线圈与匹配谐振后的微天线进行耦合，在 6mm 处该微天线的谐振电 压达到 7.1V ，同时将集成了标签芯片及谐振电容的微天线与符合 ISO14443 标准的读卡器进行通信，其通信距 离达到 12mm。 关键词：射频识别（RFID ）；微机电系统（MEMS ）；微天线；仿真；设计 中图分类号：TN820.1 文献标识码：A 文章编号：1001-3830(2014)06-0037-04 Design and implementation of a novel RF-MEMS antenna for 13.56MHz applications YE Qi, QU Bing-jun, GENG Yu -jie Institute of Microelectronics, Tsinghua University, Beijing 100084, China Abstract: In this paper, a novel RF-MEMS antenna for 13.56MHz applications is presented to resolve the problems exist in the large area spiral antenna. RF-MEMS antenna is simulated and designed by means of high frequency structure simulator (HFSS) software. By MEMS process, the micro antenna has been fabricated, which consists of solenoid-type coil and high performance ferrite film, and has a measurement of less than 10mm×6.7mm×0.46mm. Test results show that the sensitivity of the micro antenna achieves 36.2mV/μT. Voltages up to 7.1 V were obtained at the resonant micro antenna from a 1.6μH reader coil at 6 mm distance. The assembled micro antenna with RFID chip and capacitor was tested using an ISO14443 type RFID reader at 13.56 MHz and successful communication was established at a distance of 12 mm. Key words: radio frequency identification （RFID ）; micro electromechanical system （MEMS ）; micro a