Amkor Line Moire Evaluation.pdf

CERT# 72037 CERT# 401.2/96 LineMoire - Another Alternative Warpage Measurement Equipment Prepared by : Christopher Palacio/Rachel Abinan/Bert Maranan TABGA PE - FOL Reviewed by : Rudy Barbosa TABGA PE - FOL Team Leader Approved by : Jun Bumanlag TABGA PE - Section Manager : Bob Bancod TABGA HVM - Department Manager TABGA PROCESS ENG’G CERT# 72037 CERT# 401.2/96 1.0 INTRODUCTION The desire to automate the tape warpage measurement have brought us to compare semi-automated (Linemoire) and manual (Hisomet) method of warpage check. It covers a comparative analysis of the method, tool’s cost, measurement capability, throughput and functionality. 2.0 SCOPE This applies to substrates that undergo warpage measurements. 3.0 EQUIPMENT /MATERIALS LineMoire Hisomet Slotted Magazine Prebaked Tape in strip form Substrate jigs Finger cots / gloves TABGA PROCESS ENG’G CERT# 72037 CERT#