La0.5Sr0.5CoO3薄膜的制备及其湿敏性质的研究.PDF

3 1 6 ( ) V ol 31 N o6 2006 12 Journal ofK unm ing U n iversity of Sc ience and T echnology ( Sc ience and T echnology) De c 2006 La Sr CoO 0. 5 0. 5 3 1 1 2 2 1 王建禄, 彭巨擘 , 蔡 毅, 普朝光 , 张鹏翔 ( 1 , 650031; 2 , 650223) : 利用脉冲激光沉积( PLD) 的方法, 在 S iO / Si衬底成功制备了钙钛矿结构的 L a Sr CoO 2 0 5 0 5 3 薄膜 对制备的薄膜生长的薄膜进行了XRD 量分析, 并且对薄膜的表面形貌进行了 量分析 着重对薄膜的电阻进行了 量, 发现环境气氛对电阻的影响, 进而对薄膜湿敏电阻进行了 量 : 脉冲激光溅射沉积; 镧锶钴氧薄膜; 湿敏电阻 : TG 132 : A : 1007 - 855X ( 200 6) 06- 0022 - 03 Preparation and H um id Sensitivity Studies of La Sr CoO F ilm 0. 5 0. 5 3 1 1 2 2 1 W A NG J ai n-lu , PENG Ju-bo , CA IY i , PU C hao-guang , ZHA NG Peng-x iang ( 1 In stitute of A dvanced M ate rials for Photo - E lectron ics, Kunm ing U n iversity o f Sc ience and T echno logy, Kunm ing 650051, Ch ina; 2 K unm ing Institute of Phy sics, K unm ing 650223, China) Abstra t: L a Sr CoO f ilm s h ave been deposited on S iO /S i subtracts su ccessfu lly by the Pu lse L aser D epos-i 0 5 0 5 3 2 t ion T hen the XRD and SEM o f L a Sr CoO film s have been m easured and ana lyzed In particular, m easuring 0 5 0 5 3 the resistance o