University of Arizona’s Innovative Planarization （亚利桑那大学的创新整平）.pdf

University of Arizona’s Innovative Planarization Laboratory Prof. Ara Philipossian (ara@engr.arizona.edu) Department of Chemical and Environmental Engineering University of Arizona Tucson, AZ 85721 USA 1 Mission Statement Collaborate with world-class equipment suppliers, consumables suppliers, IC makers and research centers to provide novel planarization solutions through advancement of fundamental knowledge educational methods Research Thrusts Sponsors • Lubrication and wear … Coefficient of friction analysis and force spectroscopy • Fluid dynamics … Dual Emission UV-Induced Fluorescence imaging, residence time analysis vessel dispersion analysis • Fundamental pad, slurry and conditioner characterization design • Thermal modeling • Post-planarization cleaning • Planarization post-planarization cleaning equipment design 2001 2002 2003 2004 Degussa Hitachi Chemical JSR Sandia National Labs Fujimi Isamu Koshiyama Fujikoshi Asahi Sunac Showa Denko Neopad Courtesy of Tufts University Research Partners • Intel Corporation … Research Partner • STMicroelectronics … Research Partner • Hitachi Limited … Research Partner • Atofina … Research Partner • Pall Corporation … Research Partner • Intelligent Planar Research Partner •