the assessment for sensitivity of a no2 gas sensor with znga2o4zno core-shell nanowires—a novel approach评估no2气体传感器的灵敏度与znga2o4zno核壳nanowires-a新颖的方法.pdf

Sensors 2010, 10, 3057-3072; doi:10.3390/s100403057 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article The Assessment for Sensitivity of a NO Gas Sensor with 2 ZnGa O /ZnO Core-Shell Nanowires—a Novel Approach 2 4 I-Cherng Chen 1,*, Shiu-Shiung Lin 2, Tsao-Jen Lin 3, Cheng-Liang Hsu 4, Ting Jen Hsueh 5 and Tien-Yu Shieh 2,* 1 Micro Systems Technology Center, ITRI South, Industrial Technology Research Institute, Tainan 709, Taiwan 2 College of Dental Medicine, Kaohsiung Medical University, Kaohsiung 807, Taiwan 3 Chemical Engineering Department, National Chung-Cheng University, Chia-Yi, 621, Taiwan 4 Department of Electronic Engineering National University of Tainan, Tainan, 700, Taiwan 5 National Nano Device Laboratories, Tainan 741, Taiwan * Authors to whom correspondence should be addressed; E-Mails: eugenechen@.tw (I-C.C.); tiyush@.tw (T.-Y.S.). Received: 15 March 2010; in revised form: 23 March 2010 / Accepted: 24 March 2010 / Published: 30 March 2010 Abstract: The application of novel core-shell nanowires composed of ZnGa O /ZnO to 2 4 improve the sensitivity of NO2 gas sensors is demonstrated in this study. The growth of ZnGa O /ZnO core-shell nanowires is performed by reactive evaporation on patterned 2 4 ZnO:Ga/SiO /Si