TFTLCD进阶学习.pdf

Amorphous Silicon Thin Film Amorphous Silicon Thin Film Transistors Liquid Crystal Displays Transistors Liquid Crystal Displays (A-Si TFT-LCDs) (A-Si TFT-LCDs) Process Technology and Array Design Process Technology and Array Design Dr. Fang-Hsing Wang ( 汪芳興) Dec, 20, 2002 Dec, 20, 2002 Wintek Talk / 汪芳興 Wintek Talk / 汪芳興 Outline Outline 1. TFT Technology for AMLCD 2. Amorphous Silicon 3. Materials and Processing for a-Si TFT 4. Design Consideration of a-Si TFT LCD 5. Summary and Future Trend Wintek Talk / 汪芳興 Wintek Talk / 汪芳興 Process Technology of Amorphous Silicon Process Technology of Amorphous Silicon Thin Film Transistors Thin Film Transistors 1. TFT Technology for AMLCD • Introduction to TFT • Advantages and disadvantages • Applications and classification • Overview of AMLCD technology 2. Amorphous Silicon 3. Materials and Processing for a-Si TFT 4. Design Consideration of a-Si TFT LCD 5. Summary and Future Trend 3 Wintek Talk / 汪芳興 Wintek Talk / 汪芳興 Introduction to A-Si TFT-LCD 1885 奧㆞利植物學家Reintzer發現液態晶體 y r 液晶 (liquid crystal) : 具有異方向性特質的液體 o t 1972提出 a-Si:H TFT LCD 構想 s i 1985 first Poly-Si TFT LCD (Seiko Epson) H 1988 A-Si:H TFT-LCD量產 e r Japan :