基于机器视觉半球面微小孔位置精密测量系统.pdf

第 14卷 第 1期 纳 米 技 术 与 精 密 工 程 Vo1．14 No．1 2016年 1月 Nanotechnology and Precision Engineering Jan．2016 DOI10．13494／j．npe HuangJie．XuBin．Amachinevisionsystemforpositionmeasurementofsmallholesonsphericalsurface[J]．NanotechnologyandPrecisionEngineering 2016，14(1)：28-34． A MachineVision System forPositionM easurementofSmall HolesonSphericalSurface HuangJie，XuBin (SchoolofManufacturingScienceandEngineering，SichuanUniversity，Chengdu610065，China) Abstract：Thispaperpresentsamachinevisionsystem forthepositionmeasurementofsmallholesfabri- catedonasphericalsurface．Themachinevisionsystem consistsoftworotationstagestorotatethemeas— urementsample，animagingsensortoscanthesurfaceprofileofthesmallholeunderdetectionandavi— bration．isolationtabletoreducethedisturbanceofthemeasurementenvironment．Inthispaper，theap- proachtomeasuringthespatialpositionofsmallholeswasfirstlyintroducedbasedonthemethodofor。 thogonalrotaryscanning．Duetothattheimagequalityaroundtheholeedgewasinfluencedbythema— chiningdefectsandmachiningmarks，theimageprocessingalgorithm tosearchtheholeedgeandtode— terminetheholecentrewasdescribedindetail．Then，toverifythefeasibilityofthemachinevisionsys— tern ，thepositionmeasurementofahemisphericalartifact，ofwhichtheradiuswas60mm andonwhich thesurfacewasfabricatedwithsmallholeswithradiusof2mm ，wascarriedout．Furthermore，themeas- urementrepeatabilityofthespatialpositionofsmallholeswasexperimentallyinvestigated，andthemeas— urementaccuracyofthatwasalsostudiedbyanopticalautocollimator．Experimentalresultindicatesthat therepeatabilityerrorswere1．0”and1．4”．themaximum deviationsoftheholeposition measurement were2．13”and4．13”． Keywords：measurementtechno