双端固支谐振梁动态响应分析.pdf

International Journal of Mechanics Research 力学研究, 2017, 6(4), 151-160 Published Online December 2017 in Hans. /journal/ijm /10.12677/ijm.2017.64016 Dynamic Response Analysis of Double-Ended Resonant Beams Weiwei Xing, Haolin Li, Shuo Zhang, Shangchun Fan School of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing nd th th Received: Nov. 22 , 2017; accepted: Dec. 6 , 2017; published: Dec. 12 , 2017 Abstract The resonant sensor has attracted more attention because of its high sensitivity, small footprint, stability, compatibility with multiple-phase samples. The typical resonant sensor measures reso- nant frequency modulated by axial load to realize mass sensing. Dynamic characteristic is an im- portant factor to evaluate stability of resonant beam, and the key point is to analyze the dynamic response of the resonant beam under dynamic axial load. The article is based on infinitesimal method; mathematical model of vibration of resonant beam impacted by dynamic axial force was established through the resonant beam micro mechanical balance and analyzed through Mathieu equation. Equivalent circuit method was chosen to solve vibration model. The simulation of the circuit shows the dynamic response of resonant beam under the typical axial load. Besides, the ar- ticle studied the effect of damping on the resonant beam and concluded the damping only influ- enced on vibration amplitude scarcely on frequency. Keywords Resonant Beam, Dynamic Response, Sensor, Equivalent Circuit, Damping 双端固支谐振梁动态响应分析 邢维巍，李昊霖，张 硕，樊尚春 北京航空航天大学仪器科学与光电工程学院，北京 收稿日期：2017年11月22 日；录用日期：2017年12月6 日；发布日期：2017年12月12 日 摘 要 谐振式传感器的高动态应用近