4N级碳化硅硅微粉的制备技术研究.docx
4N级碳化硅硅微粉的制备技术研究
目录
4N级碳化硅硅微粉的制备技术研究(1)........................5
内容概括................................................5
1.1研究背景与意义.........................................5
1.2文献综述...............................................6
理论基础与实验原理......................................7
2.1硅微粉的基本理论......................................10
2.2碳化硅的物理化学特性..................................11
2.3制备技术的理论依据....................................12
实验材料与设备.........................................14
3.1实验材料介绍..........................................15
3.2实验设备介绍..........................................15
制备方法与工艺流程.....................................17
4.1传统制备方法..........................................18
4.2新近研发的制备技术....................................20
4.3工艺流程优化..........................................22
产品质量控制...........................................22
5.1质量标准与评价指标....................................23
5.2质量控制流程..........................................26
5.3质量影响因素分析......................................27
实验结果与分析.........................................28
6.1实验数据收集..........................................30
6.2实验结果展示..........................................32
6.3结果分析与讨论........................................33
结论与展望.............................................33
7.1研究成果总结..........................................34
7.2存在的问题与挑战......................................36
7.3后续工作建议..........................................37
4N级碳化硅硅微粉的制备技术研究(2).......................38
内容概述...............................................38
1.1研究背景与意义........................................39
1.2国内外研究现状分析....................................40
1.3研究内容与方法........................................41
材料与设备.............................................43
2.1主要实验材料..........................................44
2.1.1硅源的选择..........................................45
2.1.2碳化硅前驱体........................................49
2.2实验设备介绍..........................................50
2.2.1球磨机