synthesis methods, microscopy characterization and device integration of nanoscale metal oxide semiconductors for gas sensing合成方法,显微镜表征和设备集成的纳米金属氧化物半导体气体传感.pdf

Sensors 2009, 9, 7866-7902; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Synthesis Methods, Microscopy Characterization and Device Integration of Nanoscale Metal Oxide Semiconductors for Gas Sensing 1, 2 2 3 Randy L. Vander Wal *, Gordon M. Berger , Michael J. Kulis , Gary W. Hunter , 3 3 Jennifer C. Xu and Laura Evans 1 Penn State University, Department of Energy and Mineral Engineering, The Energy Institute and The Penn State Institutes of Energy and The Environment (PSIEE), 203 Hosler Bldg. University Park, PA 16802, USA 2 The National Center for Space Exploration Research (NCSER), 21000 Brookpark Road, Cleveland, OH 44135, USA; E-Mails: Gordon.M.Berger@ (G.M.B.); Michael.J.Kulis@ (M.J.K.) 3 NASA Glenn Research Center, 21000 Brookpark Road Cleveland, OH 44135, USA; E-Mails: Gary.W.Hunter@ (G.W.H.); Jennifer.C.Xu@ (J.C.X.); Laura.Evans@ (L.E.) * Author to whom correspondence should be addressed; E-Mail: RandyVW@; Tel.: +1-814-865-5813; Fax: +1-814-865-3248. Received: 28 July 2009; in revised form: 25 September 2009 / Accepted: 29 September 2009 / Published: 30 September 2009 Abstract: A comparison is made between SnO , ZnO, and TiO single-crystal nanowires 2 2 and SnO2 polycrystalline nanofibers for gas sensing. Both nanostructure