经济型气体质量流量计.pdf

FMA1700 1800 FMA1828 U U 316 U LCD U NIST 1.5% 15 ~ 25°C5 ~ 60 psia (0.35 ~ 4.2 kg/ cm2)3% FMA1700 1800 0 ~ 50°C1 ~ 500 psia 10 SCCM FMA178BP (0.07 ~ 10 kg/cm2) ≥100 SLM 0 ~ 20% 1000 SLM 40 0.5% FMA1700 1800 200 °C0.15% FMA1700 1800 12 Vdc 200 mA psi (0.07 bar) 0.01% FMA178PW 2 2 SLM inH O SLM inH O 316 FMA178C 10 1 80 168 9 D 3 20 14 100 227 FMA1700 0 ~ 5 Vdc 30 34 200 112 0 ~ 5 Vdc 4 ~ 20 mA 50 90 500 140 4 ~ 20 mA FMA178C-MA 60 129 1000 252 FMA1800 31⁄ 2 FMA1800LCD 800 msec 90 25 ~ 100%2 SCCMSLM FMA18RC 2% 2 500 psig (35 kg/cm LCD ; 20 psig LCD 0 ~ 50°C (0 ~ 122°F) 1 x 10-7 std cc/sec FMA1700 1800