Study on high pressure plasma produced by ArF laser.pdf

4 0 Study on high pressure plasma produced by ArF 0 2 laser v o N Norio Tsuda∗ and Jun Yamada 7 Dept. Electronics, Aichi Institute of Technology, ] 1247 Yakusa-cho, Yachigusa, Toyota, 4700392, JAPAN h * E-mail:n-tsuda@aitech.ac.jp p - m Abstract. s When an ArF excimer laser beam was focused in a high pressure argon gas from 50 a l to 130 atm, the plasma development is observed by streak camera from side window of p . chamber. The high pressure ArF laser plasma develops symmetrically and the plasma s c produced by ArF excimer laser hardly develops as compared with the plasma produced i by XeCl. The photon energy of ArF laser light is higher than the XeCl laser. The s y transmittance of ArF laser light was measured. Almost all the laser light is transmitted h as the frequency of laser light is higher than the plasma frequency, and the energy of p [ laser light is hardly working for plasma development. The backward and forward plasma development produced by the ArF laser was calculated by the breakdown wave 1 and the radiation supported shock wave, which agreed with the experimental one. v 8 The backward development mechanism of high pressure ArF plasma is same as one 6 of plasma produced by XeCl laser. However, the forward development mechanism of 0 ArF plasma differs from one of plasma produced by XeCl laser. 1 1 4 0 / s 1. Introduction c i s y When a high pressure gas is irradiated by