stability, nonlinearity and reliability of electrostatically actuated mems devices稳定性、非线性和静电驱动mems器件的可靠性.pdf

Sensors 2007, 7, 760-796 sensors ISSN 1424-8220 © 2007 by MDPI /sensors Review Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices Wen-Ming Zhang 1,*, Guang Meng 1 and Di Chen 2 1 State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China 2 National Key Laboratory of Micro/Nano Fabrication Technology, Shanghai Jiao Tong University, 1954 Huashan Road, Shanghai 200030, China * Author to whom correspondence should be addressed; E-mail: wenmingz@. Received: 13 April 2007 / Accepted: 22 May 2007 / Published: 31 May 2007 Abstract: Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be expl