structure and process of infrared hot electron transistor?arrays结构和过程的红外热电子晶体管数组.pdf
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Sensors 2012, 12, 6508-6519; doi:10.3390/s120506508
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sensors
ISSN 1424-8220
/journal/sensors
Article
Structure and Process of Infrared Hot Electron
Transistor Arrays
Richard Fu
U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783, USA;
E-Mail: richard.x.fu.civ@; Tel.: +1-301-394-1473; Fax: +1-301-394-0310
Received: 10 April 2012; in revised form: 9 May 2012 / Accepted: 14 May 2012 /
Published: 16 May 2012
Abstract: An infrared hot-electron transistor (IHET) 5 × 8 array with a common base
configuration that allows two-terminal readout integration was investigated and fabricated
for the first time. The IHET structure provides a maximum factor of six in improvement in
the photocurrent to dark current ratio compared to the basic quantum well infrared
photodetector (QWIP), and hence it improved the array S/N ratio by the same factor. The
study also showed for the first time that there is no electrical cross-talk among individual
detectors, even though they share the same emitter and base contacts. Thus, the IHET
structure is compatible with existing electronic readout circuits for photoconductors in
producing sensitive focal plane arrays.
Keywords: quantum well infrared photodetector (QWIP); infrared hot-electron transistor
(IHET); GaAs
1. Introduction
There is an urgent need for affordable, sensitive and high resolution long wavelength (λ ~ 10 μm)
infrared focal plane arrays (LWIR FPAs
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