GB/T 44842-2024微机电系统（MEMS）技术　薄膜材料的弯曲试验方法.pdf

ICS

31.080.99

CCS

L59

中华人民共和国国家标准

GB/T44842—2024/IEC62047﹘18:2013

微机电系统（MEMS）技术薄膜

材料的弯曲试验方法

Micro-electromechanicalsystems（MEMS）technology—

Bendtestingmethodsofthinfilmmaterials

（IEC62047-18:2013,Semiconductordevices—Micro-electromechanical

devices—Part18:Bendtestingmethodsofthinfilmmaterials,IDT）

2024-10-26发布2024-10-26实施

国家市场监督管理总局

发布

国家标准化管理委员会

GB/T44842—2024/IEC62047﹘18:2013

目次

前言

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1

范围

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2

规范性引用文件