Performance Evaluation of Micromechanical Binary Phaseonly Holographic Optical Elements.pdf
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Performance Evaluation of Micromechanical Binary Phaseonly
Holographic Optical Elements
David A Winick Bruce E Duewer S Palchaudhury Paul D Franzon
Integrated Electronic Systems Lab oratory
Department of Electrical and Computer Engineering
North Carolina State University
Box Raleigh NC
httpwwwecencsueduerl
A bstract This pap er presents some results of our in digital mo de to approximate binary holographic ele
development and test eorts in micromachine design for ments with applications in optical interconnect and pro
optical mo dulation In this work we have develop ed us jection display generation The actuation characteristic
ing a readily available surface micromachine fabrication of these elements under prop er biasing exhibits a bista
pro cess MUMPs a series of arrayed micromirror ele bility that would enable lowp ower highyield elements
ments These element arrays form phasemostly spatial that can b e addressed progressively in the form of a pas
light mo dulators SLMs similar to Texas Instruments sive matrix The ability to address an N N array using
exure b eam micromirror device FBMD Character O N lines from the p eriphery rather than O N 2 lines
istics that distinguish our elements from those of TI in or verticallyintegrated logic allows for relatively compact
clude integrated supp ort p osts to stabilize the elements and inexp ensive layout A detailed explanation of this ad
at p oints b eyond pullin p otential nonmetallic supp orting dressability is included in Section
structures to reduc
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