Performance Evaluation of Micromechanical Binary Phaseonly Holographic Optical Elements.pdf

Performance Evaluation of Micromechanical Binary Phaseonly Holographic Optical Elements David A Winick Bruce E Duewer S Palchaudhury Paul D Franzon Integrated Electronic Systems Lab oratory Department of Electrical and Computer Engineering North Carolina State University Box Raleigh NC httpwwwecencsueduerl A bstract This pap er presents some results of our in digital mo de to approximate binary holographic ele development and test eorts in micromachine design for ments with applications in optical interconnect and pro optical mo dulation In this work we have develop ed us jection display generation The actuation characteristic ing a readily available surface micromachine fabrication of these elements under prop er biasing exhibits a bista pro cess MUMPs a series of arrayed micromirror ele bility that would enable lowp ower highyield elements ments These element arrays form phasemostly spatial that can b e addressed progressively in the form of a pas light mo dulators SLMs similar to Texas Instruments sive matrix The ability to address an N  N array using exure b eam micromirror device FBMD Character O N lines from the p eriphery rather than O N 2 lines istics that distinguish our elements from those of TI in or verticallyintegrated logic allows for relatively compact clude integrated supp ort p osts to stabilize the elements and inexp ensive layout A detailed explanation of this ad at p oints b eyond pullin p otential nonmetallic supp orting dressability is included in Section structures to reduc