光栅横向位移遥测传感器-光学精密工程.PDF

7 1 Vol.7, No. 1 1999 2 OPT ICS AND PRECISION ENGINEERIN G February , 1999 * 杨　鑫　　郭尚旗　　张国雄　　蒋诚志 ( 天津大学精密仪器与光电子工程学院　　天津3 72) , , , , , 1 , [ 1] , 1mm 818 ( 75 ) , , , , 2mm 1 m, 1mm, . 1%[ 2] , , , , , , , , 1 m , , , , , , , , , , , , * ( 5937257) : 1998- 8- 27 : 1998- 1 - 29 7 86 2m5 m, . 4m, 1 1 2 , Vcos f = f ( 1 + ) ( 1) u : f ;f ; V , + , ; u ; , 1, : V ( sini - sin) f = f k - f = ( 2) : i ; ; V ; Fig . 1Grating Doppler effect d( sini sin) = k, : kV f k = ( 3) d : k ; d ; f k k ( 3) , , , , f 1 = V/ d, f - 1 = -V/ d , : ( 1) Fig . 2Frequency shift character of reflect ion grat ing , , 2( A) ; ( 2) , 1 , , , 2( B) ; ( 3) 2( B) - 1 , + 1 , : f 1 = V/ d , ; , 2( B) + 1 , - 1 , 1 : 87 : f - 1 = - V/ d , 2( C) , 2( D) 2( ) ( ) , , ( ) C D C + 1 ( D) - 1 , , : V V 2V f = d - ( - d ) = d (4) , x : t t 2 V ( t) 2x N = f ( t) dt =