Unit 8160 Series MHz Electronics(单位8160系列兆赫电子产品).pdf
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Unit 8160 Series
High performance mass flow controllers and meters
™
» MultiFlo option for superior performance, reduced inventory
and in situ support
» Advanced design using proven technology for the high
performance that is required for next generation
semiconductor applications
» Best performance and reliability in the industry
» Popular ultra-high purity metal seal flow controller
» Available with analog, RS485, and DeviceNet™ interfaces
Features at a glance The Celerity advantage
• Advanced corrosion resistance via passivated 316L SS • Digital control
• Ultra-high purity 4µ inch Ra surface finish • Designed to operate on tools designed for
analog MFCs
• 50% reduction in dry-down time compared to high-purity 1660
Series models. Dry-down is reduced because of better surface • Increased reliability with over 585,000 hours
smoothness and chemistry. 8160 Series also have higher purge MTBF
flows than conventional MFCs.
• High resolution calibration control that utilizes a
• Sealed with high leak integrity metal seals. Uses metal seals to 32 point calibration table for each gas
produce a leak integrity of 1 x 10–10 atm-cc/sec (He)
• MultiFlo MFCs can be reconfigured for multiple
• Higher reliability – MTBF of 550,000 hours and ultra-low drift of gases and flow ranges. They eliminate the need
less than 0.6% per year to reduce year-to-year maintenance, to purchase spares for each application,
increase uptime and reduc
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