Unit 8160 Series MHz Electronics（单位8160系列兆赫电子产品）.pdf

Unit 8160 Series High performance mass flow controllers and meters ™ » MultiFlo option for superior performance, reduced inventory and in situ support » Advanced design using proven technology for the high performance that is required for next generation semiconductor applications » Best performance and reliability in the industry » Popular ultra-high purity metal seal flow controller » Available with analog, RS485, and DeviceNet™ interfaces Features at a glance The Celerity advantage • Advanced corrosion resistance via passivated 316L SS • Digital control • Ultra-high purity 4µ inch Ra surface finish • Designed to operate on tools designed for analog MFCs • 50% reduction in dry-down time compared to high-purity 1660 Series models. Dry-down is reduced because of better surface • Increased reliability with over 585,000 hours smoothness and chemistry. 8160 Series also have higher purge MTBF flows than conventional MFCs. • High resolution calibration control that utilizes a • Sealed with high leak integrity metal seals. Uses metal seals to 32 point calibration table for each gas produce a leak integrity of 1 x 10–10 atm-cc/sec (He) • MultiFlo MFCs can be reconfigured for multiple • Higher reliability – MTBF of 550,000 hours and ultra-low drift of gases and flow ranges. They eliminate the need less than 0.6% per year to reduce year-to-year maintenance, to purchase spares for each application, increase uptime and reduc