标准、规范、准则_JIS C5630-1-2008 Semiconductor devicesMicro-electromechanical devices Part 1 Terms and definitions.pdf
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C 5630-1 2008 (IEC 62047-1 2005)
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1 ·········································································································································································· 1
2 ································································································································································· 1
2.1··············································································································································································· 1
2.2···········································································································································································2
2.3······································································································································································4
2.4······································································································································································4
2.5···································································································································································· 10
2.6························································································································································ 17
2.7·····························································
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